Micro-material handling employing e-beam generated topographies of copper and aluminium

dc.contributor.authorMatope, S.en_ZA
dc.contributor.authorVan der Merwe, A. F.en_ZA
dc.contributor.authorNemutudi, R.en_ZA
dc.contributor.authorNkosi, M.en_ZA
dc.contributor.authorMaaza, M.en_ZA
dc.date.accessioned2012-01-18T08:06:31Z
dc.date.available2012-01-18T08:06:31Z
dc.date.issued2011-11
dc.descriptionCITATION: Matope, S., Van der Merwe, A. F., Nemutudi, R., Nkosi, M. & Maaza, M. 2011. Micro-material handling employing e-beam generated topographies of copper and aluminium. South African Journal of Industrial Engineering, 22(2):175-188, doi:10.7166/22-2-24.
dc.descriptionThe original publication is available at http://sajie.journals.ac.za
dc.description.abstractENGLISH ABSTRACT: This paper focuses on the employment of copper and aluminium in a micro-material handling system actuated by Van der Waals forces. Electron beam (e-beam) evaporator deposited both materials on a silicon substrate at a rate of 0.6-1.2 Angstroms/second, vacuum pressure between 2x10-6 and 3x10-6mbar, and at a current less than 10mA. A Veeco NanoMan V Atomic Force Microscope with Nanoscope version 7.3 software was used to analyse the root mean square (rms) surface roughnesses of the generated topographies. Rumpf-Rabinovichs rms formula was used to determine the Van der Waals forces exerted by the surfaces. It was synthesised that an e-beam deposition of 7 minutes duration on both materials produced an optimum micro-material handling solution, with copper suitable for the pick-up position and aluminium for the placement position.en_ZA
dc.description.abstractAFRIKAANSE OPSOMMING: Die fokus van die artikel is op die gebruik van koper en aluminium in n mikromateriaalhanteringstelsel, aangedryf deur Van der Waalskragte. n Elektronstraal-verdamper plaas albei materiale op n silikonbasis teen n tempo van 0.6-1.2 Angstrom/sekonde, vakuumdruk tussen 2x10-6 en 3x10-6mbar, en teen n stroom van minder as 10mA. n Veeco NanoMan V Atomic Force mikroskoop, met Nanoscope 7.3 program-matuur is gebruik om die wortel-gemiddelde-kwadraat (wgk) oppervlak ruheid van die gegenereerde topografiete analiseer. Rumpf-Rabinovich se wgk-formule is gebruik om die Van der Waalskrage wat deur die oppervlaktes uitgeoefen word te bepaal. Dit is vasgestel dat n elektronstraalafsetting van 7 minute op albei materiale die optimale materiaalhanteringoplossing bied, met koper geskik vir die optelposisie en aluminium vir die plasingsposisie.af_ZA
dc.description.urihttp://sajie.journals.ac.za/pub/article/view/24
dc.description.versionPublisher's version
dc.format.extent14 pagesen_ZA
dc.identifier.citationSouth African Journal of Industrial Engineering
dc.identifier.citationMatope, S., Van der Merwe, A. F., Nemutudi, R., Nkosi, M. & Maaza, M. 2011. Micro-material handling employing e-beam generated topographies of copper and aluminium. South African Journal of Industrial Engineering, 22(2):175-188, doi:10.7166/22-2-24.
dc.identifier.issn2224-7890 (online)
dc.identifier.issn1012-277X (print)
dc.identifier.otherdoi:10.7166/22-2-24
dc.identifier.urihttp://hdl.handle.net/10019.1/19049
dc.language.isoen_ZAen_ZA
dc.publisherSouthern African Institute of Industrial Engineeringen_ZA
dc.rights.holderAuthors retain copyrighten_ZA
dc.subjectAtomic force microscopyen_ZA
dc.subjectElectron beams -- Evaporatorsen_ZA
dc.subjectCopper -- Electric propertiesen_ZA
dc.subjectAluminumen_ZA
dc.titleMicro-material handling employing e-beam generated topographies of copper and aluminiumen_ZA
dc.typeArticleen_ZA
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