A roadmap towards NanoElectroMechanical systems

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dc.contributor.advisorPerold, W. J.en_ZA
dc.contributor.authorTerblanche, Eugeneen_ZA
dc.contributor.otherUniversity of Stellenbosch. Faculty of Engineering. Dept. of Electrical and Electronic Engineering.
dc.date.accessioned2009-03-03T10:03:06Zen_ZA
dc.date.accessioned2010-06-01T08:43:49Z
dc.date.available2009-03-03T10:03:06Zen_ZA
dc.date.available2010-06-01T08:43:49Z
dc.date.issued2009-03en_ZA
dc.descriptionThesis (MScEng (Electrical and Electronic Engineering))--University of Stellenbosch, 2009.en_ZA
dc.description.abstractNanoelectromechanical systems (NEMS) are the integration of nanotechnology and microelectromechanical systems (MEMS). The idea of this thesis is to give a basic preparation to approach NEMS, a subcategory of nanotechnology. This is performed by gaining knowledge of the two separate fields NEMS consist of, namely MEMS and nanotechnology. This document will discuss the basic theory and fabrication tools for microelectromechanical systems, as well as its limits as MEMS feature sizes decrease, reaching toward nanotechnology. It starts with an introduction that includes the history, giving a basic background. The essence is captured with theory of the equipment, the main material, some concepts of design and the creation of structures. To stimulate further interest, this thesis also illustrates practical design and fabrication methods. With the knowledge and skills that were discussed, one should be ready to get started with NEMS.en_ZA
dc.identifier.urihttp://hdl.handle.net/10019.1/2229
dc.language.isoenen_ZA
dc.publisherStellenbosch : University of Stellenbosch
dc.rights.holderUniversity of Stellenbosch
dc.subjectMicroelectromechanical systemsen_ZA
dc.subjectNanoelectromechanical systemsen_ZA
dc.subjectNanotechnologyen_ZA
dc.subjectDissertations -- Electronic engineeringen_ZA
dc.subjectTheses -- Electronic engineeringen_ZA
dc.subject.otherElectrical and Electronic Engineeringen_ZA
dc.titleA roadmap towards NanoElectroMechanical systemsen_ZA
dc.typeThesisen_ZA
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