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Modelling and analysis of the geometrical errors of a parallel manipulator micro-CMM

dc.contributor.authorRugbani A.
dc.contributor.authorSchreve K.
dc.date.accessioned2012-06-06T07:59:59Z
dc.date.available2012-06-06T07:59:59Z
dc.date.issued2012
dc.identifier.citationIFIP Advances in Information and Communication Technology
dc.identifier.citation371 AICT
dc.identifier.citation105
dc.identifier.citation117
dc.identifier.issn18684238
dc.identifier.otherdoi:10.1007/978-3-642-28163-1_14
dc.identifier.urihttp://hdl.handle.net/10019.1/21295
dc.description.abstractA micro coordinate measurement machine (micro-CMM) with high precision and high accuracy is introduced for the measurement of part dimensions in micro scale. This design is intended to achieve submicron resolution for a work envelop of at least (100x100x100) mm. In this study, a mathematical measuring model to explicitly define the coordinate of the probe in x, y and z directions have been represented. An algorithm to find the workspace was implemented. The error model of the machine was created and the effect of structural errors on probe position was studied analytically. The significance of each geometric parameter was studied in order to minimize the measuring error and achieve the best machine design. Finally, the results of the analytical error model were confirmed through a Monte Carlo analysis. © 2012 IFIP International Federation for Information Processing.
dc.subjectcovariance matrix
dc.subjecterror model
dc.subjectmicro-CMM
dc.subjectmicro-measurement
dc.subjectMonte Carlo simulation
dc.subjectparallel manipulator
dc.titleModelling and analysis of the geometrical errors of a parallel manipulator micro-CMM
dc.typeConference Paper


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