Modelling and analysis of the geometrical errors of a parallel manipulator micro-CMM
Date
2012
Authors
Rugbani A.
Schreve K.
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
A micro coordinate measurement machine (micro-CMM) with high precision and high accuracy is introduced for the measurement of part dimensions in micro scale. This design is intended to achieve submicron resolution for a work envelop of at least (100x100x100) mm. In this study, a mathematical measuring model to explicitly define the coordinate of the probe in x, y and z directions have been represented. An algorithm to find the workspace was implemented. The error model of the machine was created and the effect of structural errors on probe position was studied analytically. The significance of each geometric parameter was studied in order to minimize the measuring error and achieve the best machine design. Finally, the results of the analytical error model were confirmed through a Monte Carlo analysis. © 2012 IFIP International Federation for Information Processing.
Description
Keywords
covariance matrix, error model, micro-CMM, micro-measurement, Monte Carlo simulation, parallel manipulator
Citation
IFIP Advances in Information and Communication Technology
371 AICT
105
117
371 AICT
105
117