A roadmap towards NanoElectroMechanical systems
Date
2009-03
Authors
Terblanche, Eugene
Journal Title
Journal ISSN
Volume Title
Publisher
Stellenbosch : University of Stellenbosch
Abstract
Nanoelectromechanical systems (NEMS) are the integration of nanotechnology
and microelectromechanical systems (MEMS). The idea of this thesis is to give
a basic preparation to approach NEMS, a subcategory of nanotechnology. This
is performed by gaining knowledge of the two separate fields NEMS consist
of, namely MEMS and nanotechnology. This document will discuss the basic
theory and fabrication tools for microelectromechanical systems, as well as
its limits as MEMS feature sizes decrease, reaching toward nanotechnology.
It starts with an introduction that includes the history, giving a basic
background. The essence is captured with theory of the equipment, the main
material, some concepts of design and the creation of structures. To stimulate
further interest, this thesis also illustrates practical design and fabrication
methods. With the knowledge and skills that were discussed, one should be
ready to get started with NEMS.
Description
Thesis (MScEng (Electrical and Electronic Engineering))--University of Stellenbosch, 2009.
Keywords
Microelectromechanical systems, Nanoelectromechanical systems, Nanotechnology, Dissertations -- Electronic engineering, Theses -- Electronic engineering