High-power excimer and CO2 TEA laser technology

Von Bergmann H.M. (2005)

Conference Paper

This article reviews the physical background and design of high-power excimer and CO2 TEA lasers, including a detailed discussion of electrode structures and pre-ionization, gas circulation and acoustic wave management as well as high-voltage switching and magnetic pulse compression technology. Chemical problems associated with the operation of excimer and CO2 lasers, the life-times of various laser components, and operating costs are also discussed.

Please refer to this item in SUNScholar by using the following persistent URL: http://hdl.handle.net/10019.1/9673
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