An investigation into the fabrication of nanomechanical switches

Schenke, Carlo (2010-03)

Thesis (MScEng (Electrical and Electronic Engineering))--University of Stellenbosch, 2010.

Thesis

ENGLISH ABSTRACT: This report intends to show how able the Stellenbosch Electrical and Electronic Engineering Department’s micro fabrication laboratory is to manufacture nanomechanical switches and similar structures. Following the investigation, an attempt will be made to produce these devices. In attaining this goal, a literature study was performed focusing on mechanical switching and nanotechnology. Their origins, development and current application are investigated, as well as the requirements for developing these devices. Having completed the literature study, a series of current nanomechanical switches where investigated, selecting those most likely to be manufactured at the available facilities and having the required attributes for taking the place of silicon transistors in low speed, hostile environments. The most common method of manufacturing nanoswitches is simulated using several methods of predicting device failure. This will aid in the selection of manufacturing process guidelines, such as dimensions in the photoresist templates and layer thickness before etching, allowing for the repeated production of functional switches. The two manufacturable nanomechanical switches are investigated, using techniques and materials available at the micro fabrication laboratory to manufacture them. Subsequently, their electrical properties will be determined and used in simulating their failure characteristics. In conclusion, the result are discussed along with advice and improvements for the continued investigation and production of nanodevices at Stellenbosch University

AFRIKAANSE OPSOMMING: Die doel met hierdie tesis is om die vermoë van die Departement Elektriese en Elektroniese Ingenieurswese se mikro-elektronika laboratorium te ondersoek ten opsigte van die vervaardiging van nanomeganiese skakelaars en aanverwante komponente. Na afloop van die ondersoek sal ’n poging aangewend word om hierdie toestelle te vervaardig. In nastrewing van hierdie doel is ’n literatuurstudie uitgevoer wat fokus op meganiese skakeling en nanotegnologie. Die oorsprong, ontwikkeling en huidige aanwending van hierdie skakelaars word ondersoek, sowel as die vereistes vir die ontwikkeling daarvan. Na voltooiing van die literatuurstudie word ’n reeks van bestaande nanomeganiese skakelaars ondersoek. Skakelaars word dan geïdentifiseer op grond van hul waarskynlike vervaardigbaarheid met die beskikbare fasiliteite. Die vereiste eienskappe vir lae spoed toepassings in omgewings waar silikon-skakelaars nie kan werk nie, word ook in ag geneem. Die mees algemene metode vir die vervaardiging van nanoskakelaars word gesimuleer met behulp van verskeie tegnieke wat toestelfaling voorspel. Die simulasies sal help in die keuse van vervaardigingsriglyne van die proses, soos die dimensies van die fotolak template en die laagdiktes voor etsing, sodat goeie resultate verkry kan word wanneer die skakelaars vervaardig word, met goeie herhaalbaarheid. Die twee gekose vervaardigbare nanomeganiese skakelaars word dan ondersoek ten opsigte van die tegnieke en materiale wat in die mikro-elektronika laboratorium beskikbaar is. Daarna sal die elektriese eienskappe van die skakelaars bepaal word. Ter afsluiting word die resultate bespreek, saam met aanbevelings vir die voortsetting van die navorsing om nanomeganiese skakelaars by die Universiteit van Stellenbosch te vervaardig.

Please refer to this item in SUNScholar by using the following persistent URL: http://hdl.handle.net/10019.1/4268
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