Modelling of MEMS vibratory gyroscopes utilizing phase detection

Dreyer, Antonie Christoffel (2008-03)

Thesis (MScEng (Mechanical and Mechatronic Engineering))--University of Stellenbosch, 2008.


This thesis aims to contribute to the modelling and analysis of MEMS gyroscope technologies. Various gyroscope types are studied, and the phase-based vibratory gyroscope is then selected for further investigation. In the literature, vibratory MEMS gyroscopes are mostly used in a single excitation and amplitude detection mode. However, a dual excitation and phase detection mode has recently been proposed, since phase-based detection, as opposed to amplitude-based detection modes, may be expected to increase measurement accuracy (in turn since improved signal-to-noise ratios may be expected). However, the presented analytical model was relatively crude, and the assumptions made appear unrealistic. Accordingly, in this thesis, an improved analyticalmodel is developed. To describe the dual excitation and phase detection problem more comprehensively, principles of classical dynamics are used herein to investigate the dual excitation of a two degree of freedom spring-mass-damper system subjected to an applied rotation rate. In doing so, an analytical formulation including mechanical coupling effects is extended into a generalized form, after which the amplitude and phase responses of the mechanically uncoupled system are interpreted. The differences between the amplitude and phase measurement techniques are illustrated. Finally, the system is modelled numerically, and the scale factor of a hypothetical device based on the phase-based detection method is optimized, subject to constraints on the nonlinearity of the device, using constrained mathematical optimization techniques.

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