Micro-material handling employing e-beam generated topographies of copper and aluminium

Matope, S. ; van der Merwe, A. F. ; Nemutudi, R. ; Nkosi, M. ; Maaza, M. (2011-11)

CITATION: Matope, S., Van der Merwe, A. F., Nemutudi, R., Nkosi, M. & Maaza, M. 2011. Micro-material handling employing e-beam generated topographies of copper and aluminium. South African Journal of Industrial Engineering, 22(2):175-188, doi:10.7166/22-2-24.

The original publication is available at http://sajie.journals.ac.za

Article

This paper focuses on the employment of copper and aluminium in a micro-material handling system actuated by Van der Waals forces. Electron beam (e-beam) evaporator deposited both materials on a silicon substrate at a rate of 0.6-1.2 Angstroms/second, vacuum pressure between 2x10-6 and 3x10-6mbar, and at a current less than 10mA. A Veeco NanoMan V Atomic Force Microscope with Nanoscope version 7.3 software was used to analyse the root mean square (rms) surface roughnesses of the generated topographies. Rumpf-Rabinovichs rms formula was used to determine the Van der Waals forces exerted by the surfaces. It was synthesised that an e-beam deposition of 7 minutes duration on both materials produced an optimum micro-material handling solution, with copper suitable for the pick-up position and aluminium for the placement position.

Die fokus van die artikel is op die gebruik van koper en aluminium in n mikromateriaalhanteringstelsel, aangedryf deur Van der Waalskragte. n Elektronstraal-verdamper plaas albei materiale op n silikonbasis teen n tempo van 0.6-1.2 Angstrom/sekonde, vakuumdruk tussen 2x10-6 en 3x10-6mbar, en teen n stroom van minder as 10mA. n Veeco NanoMan V Atomic Force mikroskoop, met Nanoscope 7.3 program-matuur is gebruik om die wortel-gemiddelde-kwadraat (wgk) oppervlak ruheid van die gegenereerde topografiete analiseer. Rumpf-Rabinovich se wgk-formule is gebruik om die Van der Waalskrage wat deur die oppervlaktes uitgeoefen word te bepaal. Dit is vasgestel dat n elektronstraalafsetting van 7 minute op albei materiale die optimale materiaalhanteringoplossing bied, met koper geskik vir die optelposisie en aluminium vir die plasingsposisie.

Please refer to this item in SUNScholar by using the following persistent URL: http://hdl.handle.net/10019.1/19049
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